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Multi-Process Dry Pumps

Multi-Process Dry Pumps

Product Category :    Pumps

Supplier                :    Alcatel Vacuum Technology India

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Product Profile of Multi-process Dry Pumps

The Alcatel Vacuum Technology India manufactures Multi-process Dry Pumps [ADP/ADS Series Two]. Alcatel Vacuum Technology India has been awarded with ISO 9001 and 14001 Certification.

Multi-process Dry Pumps [ADP/ADS Series Two] covers a large range of vacuum requirements with 4 models which can be chosen from:

  • LM versions for clean applications
  • P versions for light/medium applications
  • H version for harsh applications


  • Multi-process Dry Pumps [ADP/ADS Series Two] is used by the manufacturers from the Semiconductor industry and it allows them to reduce unscheduled downtime, reduce overall running cost and increase profitability.

    The Salient Features of Multi-process Dry Pumps [ADP/ADS Series Two] are:
    High reliability to process
  • Wide inter-stage channels are able to accommodate large quantities of powder and particles.
  • High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet.
  • Vertical pumping on each stage which prevents particulate accumulation in the swept volume.


  • Semiconductor fab rules compliant
  • Compact: the series 2 model is only 390 mm wide.
  • Clean: Alcatel technology is a frictionless and oil-free pump mechanism. There is no risk of particulate contamination.
  • Quiet: All models include an integrated silencer, eliminating the need for an additional external silencer.
  • Semi S2 compliant.


  • Low cost of ownership
  • Low power consumption at working pressures and at Ultimate Pressure.
  • With moderate heat generation, series 2 water consumption is extremely low.
  • Nitrogen Purge level is easily set by the customer. Pumps for clean applications do not require any purge.
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